Prevention and counterplan of mold staining. Cleaning method of mold. 3. Mold cleaning rubber.
نویسندگان
چکیده
منابع مشابه
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We present a simple and effective mold cleaning method for nanoimprint lithography. Polydimethylsiloxane (PDMS) prepolymer is spin-coated onto a contaminated imprint mold, thermally cured in ambient environment, and then peeled off afterwards. Contaminants of 100s m to sub-50 nm sizes are effectively cleaned within one cycle. During the cleaning process, a very thin PDMS film (1~2 nm) is unifo...
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ژورنال
عنوان ژورنال: NIPPON GOMU KYOKAISHI
سال: 1985
ISSN: 1884-0442,0029-022X
DOI: 10.2324/gomu.58.417